Dry vacuum pumps are the development trend of the industry in the future. Although they are not used much now, in addition to the high price, users also have inadequate understanding of dry vacuum pumps and cannot see the future economic benefits to enterprises. Therefore, dry vacuum pumps How to optimize the choice of vacuum pump?

For these different types of dry vacuum pumps, we all desire to be able to reduce their physical size. But this contradicts the pumping rate of the vacuum pump, because the pumping rate of the vacuum pump is proportional to the volume of the vacuum pump, and a small physical size means a small volume. Of course, there is another important factor that affects the pumping rate of the vacuum pump, that is, the speed. In order to match the pumping rate of the small-sized vacuum pump with the pumping rate of the large-sized vacuum pump, it is necessary to increase its speed. There are two ways to change the speed of the vacuum pump. One is to change the frequency of the power supply, that is, to use a frequency converter; the other is to change the transmission ratio of the gearbox. Among them, the advantage of using a frequency converter is that it can provide a closed-loop control, but it is easy to cause torque loss under a large load. Changing the transmission ratio of the gearbox is a very economical method. Of course, it can only provide a single uncontrollable speed.

Now, you can see that there are so many different designs of dry vacuum pumps, each with its own characteristics, advantages and disadvantages. The cost of use has always been an important factor affecting people's choice of vacuum pumps. More and more vacuum pump users realize that the stability of vacuum pump operation should also be taken into consideration. Because the accidental error of the vacuum pump will reduce the efficiency of the machine, affect the production and delivery of the wafer, and even cause the scrap of the processed wafer and the damage of other parts of the machine.

Because the screw type design is a single-stage design, compared with multi-stage pumps such as round split type, claw type and combined type, the number of parts used is reduced by 60%. This makes it a great advantage in terms of stability and future maintenance costs.

Comprehensive considerations, if the user thinks that the power consumption is the most important to him and the amount of nitrogen is the least important to him, then choosing the internal compression screw type can be a good choice. But generally speaking, the increasingly stringent requirements for exhaust gas treatment make it more important to reduce the amount of nitrogen in the future. If you want to use a single type of pump to handle a variety of different semiconductor processes without changing, and to simplify your inventory control, then the external compression screw type is your best choice.

Depending on the specific situation, combining the advantages of all the above design types must be the most ideal choice, but it is not currently possible. Therefore, this requires users to first know that there are so many different design types in the design of dry pumps, and then understand the effects of various types of pump designs according to their own process characteristics. The choice made in this way can reduce its use cost as much as possible, and obtain a stable vacuum system with a long life.

Today, we have entered the era of dry vacuum pumps. Compared with the past era of rotary vane and piston oil vacuum pumps, a well-trained consumer plays a decisive role in the choice of vacuum pumps. You know, there are so many types of dry pumps to choose from, and choosing the one that best matches your semiconductor process is the key.