Now in the vacuum industry, oil-free DVE vacuum pumps with good cleanliness and high vacuum are attracting more and more attention from various industries. The development of this technology in our country has just started and needs continuous practice.

For example, in the vacuum industry in Japan, more than 70% of them are used in the semiconductor and liquid crystal display (LCD) industries. Generally, the traditional vacuum system cannot meet the requirements of clean, oil-free and corrosion resistance. Therefore, the molecular pump and low temperature in the Japanese dry DVE vacuum pump The pump is developing very fast.

At present, vacuum products have been updated, and a large number of oil-free vacuum systems have been replaced by oil-free and clean vacuum systems.

From the current market share and trends of various types of DVE vacuum pumps in my country, it can be seen that since most of my country’s vacuum industry is concentrated in general and traditional vacuum applications, the high vacuum system is still dominated by diffusion pumps, and low vacuum and front The first-grade vacuum is mainly based on rotary vane DVE vacuum pumps and slide valve pumps.

Turbomolecular pumps are currently the least produced. Large-scale or composite molecular pumps have not yet formed mass production. As for cryopumps and various types of dry DVE vacuum pumps, they have just started and cannot meet the development needs of the semiconductor industry and LCD industry.
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