Oil-type DVE vacuum pumps are commonly used types of DVE vacuum pumps in the semiconductor industry. The main feature is high vacuum, which can meet the special process requirements of new industries. Among them, rotary vane DVE vacuum pumps and reciprocating DVE vacuum pumps are the main representatives.

With the passage of time and the advancement of society, their performance in various applications has become less and less satisfactory to people. For example, rotary vane DVE vacuum pumps cannot pump water vapor, condensable gases and corrosive gases, etc., therefore, The dry DVE vacuum pump came into being.

In the past ten years or so, several different types of dry DVE vacuum pumps have been designed and produced, and they have obvious differences in mechanical structure design. Because of this difference, we can generalize dry DVE vacuum pumps into the following types: round split type, claw type, combined type (Roots + claw), screw type. Today, these types are widely used by different manufacturers.

Among them, the round-split type, claw type and combined type (Roots + claw) are called multi-stage pumps. Because they work in roughly the same way, they all use multi-stage vacuum chambers to repeatedly compress gas to generate vacuum. In the process of repeated compression, the temperature and pressure of the gas also produce more complicated changes, so it is easier to cause changes in the physical properties of the gas.

The screw type is called a single-stage pump because it only relies on a vacuum chamber to generate vacuum. According to its different gas compression methods, it can be divided into internal compression type screw pump and external compression type screw pump.